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Ultra pure water system for LCD panel industry

In the entire production process of LCD panels, 80% of the processes require a large amount of ultrapure water, and as the size of LCD panels increases and display clarity improves, the requirements for ultrapure water quality are also increasing.

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Typical ultra pure water process flow in the panel industry

The manufacturing process of LCD panels can be divided into three stages
1. The semiconductor process (array) in the early stage involves placing the thin film layer of the transistor on a glass substrate.
2. The middle section is the assembly process of liquid crystal filling, which combines the glass of the color filter with the glass of the transistor thin film layer, and fills the liquid crystal in the middle.
3. The latter part of the month is the panel module, which means adding a backlight board, iron components, and some IC parts behind the cell to become the so-called panel module.

Water standard for panel industry

Water quality indicators	DIW	UPW	Corresponding processing methods
Resistivity(MQ ·cm)	≥16.5MΩ-cm	≥18.0MQ ·cm	/
Particle((0.5μm)	≤50 ea/ml	≤10 ea/ml	MMF/MF/RO/UF
Bacteria	≤10 Col/100ml	≤5 Col/100ml	MF/UV/UF
TOC(mg/L)	≤50ppb	≤20ppb	ACF&UV(185nm)
Silica(mg/L)	≤20ppb	≤5ppb	RO/UF/IX
DO(mg/L)	≤50ppb	≤30ppb	MDG
Na(mg/L)	≤0.5ppb	≤0.1ppb	Cation lon Exchanger
K(mg/L)	≤0.5ppb	≤0.1ppb	Cation lon Exchanger
Ca(mg/L)	/	/	Cation lon Exchanger
CO3-2(mg/L)	/	/	Anion lon Exchanger
HCO3-(mg/L)	/	/	Anion lon Exchanger
Cl-(mg/L)	/	≤1.0ppb	ACF &Anion lon Exchanger
SO4-2(mg/L)	/	/

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